Scan Speed | 500mm/s |
---|---|
Inspection Defect Size | ≥50um (Edge as standard) |
Illumination type | Exterior Coaxial, Side illumination |
Align Type | Vision Align |
Dimension | L 9,750 * W 3,450 * H 4,040(㎜) |
* The above specification changes according to the Inspection Cell size.